High-Intensity airborne CMUT transmitter array with beam steering

buir.contributor.authorKhan, Talha Masood
buir.contributor.authorTaşdelen, Akif Sinan
buir.contributor.authorYılmaz, Mehmet
buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1546en_US
dc.citation.issueNumber6en_US
dc.citation.spage1537en_US
dc.citation.volumeNumber29en_US
dc.contributor.authorKhan, Talha Masood
dc.contributor.authorTaşdelen, Akif Sinan
dc.contributor.authorYılmaz, Mehmet
dc.contributor.authorAtalar, Abdullah
dc.contributor.authorKöymen, Hayrettin
dc.date.accessioned2021-02-18T12:13:46Z
dc.date.available2021-02-18T12:13:46Z
dc.date.issued2020
dc.departmentAcoustics and Underwater Technologies Research Center (BASTA)en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractA 2×2 high-intensity CMUT transmit array that is capable of two-dimensional beam steering is presented. The device uses an ac drive voltage at half the ultrasound frequency without any dc bias, enabling the usage of the entire gap height. The device is designed using a large signal equivalent model approach. A fabrication method that requires a single lithographic mask has been used. The fabricated devices are operated at 76 kHz to beam steer at various angles. An equivalent element pressure of 144 dB// 20 μ Pa at the transducer surface was measured. The entire half-space can be steered without any sidelobes and the beam obtained from the array is in excellent agreement with the theoretical predictions. [2020-0253]en_US
dc.identifier.doi10.1109/JMEMS.2020.3026094en_US
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/11693/75462
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://dx.doi.org/10.1109/JMEMS.2020.3026094en_US
dc.source.titleJournal of Microelectromechanical Systemsen_US
dc.subjectAirborne ultrasounden_US
dc.subjectBeam steeringen_US
dc.subjectCMUTen_US
dc.subjectHigh intensityen_US
dc.subjectTransducer arrayen_US
dc.subjectUnbiased CMUTen_US
dc.titleHigh-Intensity airborne CMUT transmitter array with beam steeringen_US
dc.typeArticleen_US

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