Implementation of high quality-factor on-chip tuned microwave resonators at 7GHz

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buir.contributor.authorDemir, Hilmi Volkan
buir.contributor.orcidDemir, Hilmi Volkan|0000-0003-1793-112X
dc.citation.epage501en_US
dc.citation.issueNumber2en_US
dc.citation.spage497en_US
dc.citation.volumeNumber51en_US
dc.contributor.authorMelik, R.en_US
dc.contributor.authorDemir, Hilmi Volkanen_US
dc.date.accessioned2019-02-14T06:15:02Z
dc.date.available2019-02-14T06:15:02Z
dc.date.issued2009en_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractWe report on the design, analytical modeling, numerical simulation, fabrication, and experimental characterization of chip-scale microwave resonators that exhibit high quality-factors (Q-factors) in the microwave frequency range. We demonstrate high Q-factors by tuning these microwave resonators with the film capacitance of their LC tank circuits rather than the conventional approach of using external capacitors for tuning. Our chip-scale resonator design further minimizes energy losses and reduces the effect of skin depth leading to high Q-factors even for significantly reduced device areas. Using our new design methodology, we observe that despite the higher resonance frequency and smaller chip size, the Q-factor is improved compared with the previous literature using traditional approaches. For our 540 m 540 m resonator chip, we theoretically compute a Q-factor of 52.40 at the calculated resonance frequency of 6.70 GHz and experimentally demonstrate a Q-factor of 47.10 at the measured resonance frequency of 6.97 GHz. We thus achieve optimal design for microwave resonators with the highest Q-factor in the smallest space for operation at 6.97 GHz.en_US
dc.identifier.doi10.1002/mop.24103en_US
dc.identifier.eissn1098-2760
dc.identifier.issn0895-2477
dc.identifier.urihttp://hdl.handle.net/11693/49496
dc.language.isoEnglishen_US
dc.publisherWILEYen_US
dc.relation.isversionofhttp://dx.doi.org/10.1002/mop.24103en_US
dc.source.titleMicrowave and optical technology lettersen_US
dc.subjectMicrowaveen_US
dc.subjectResonatorsen_US
dc.subjectQuality-factoren_US
dc.subjectTuningen_US
dc.subjectFabricationen_US
dc.titleImplementation of high quality-factor on-chip tuned microwave resonators at 7GHzen_US
dc.typeArticleen_US

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Department of Electrical and Electronics Engineering
Institute of Materials Science and Nanotechnology (UNAM)
Nanotechnology Research Center (NANOTAM)