CO2 polishing of femtosecond laser micromachined microfluidic channels

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Abstract

The CO2 polishing of femtosecond laser micromachined channels is studied. The surface quality before and after polishing is observed with naked eye and optical microscope. The method improves imaging of microspheres.

Source Title

Conference on Lasers and Electro-Optics

Publisher

Optical Society of America

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Citation

Published Version (Please cite this version)

Language

English