Template-based synthesis of aluminum nitride hollow nanofibers via plasma-enhanced atomic layer deposition

buir.contributor.authorUyar, Tamer
buir.contributor.authorBıyıklı, Necmi
buir.contributor.orcidUyar, Tamer|0000-0002-3989-4481
dc.citation.epage922en_US
dc.citation.issueNumber3en_US
dc.citation.spage916en_US
dc.citation.volumeNumber96en_US
dc.contributor.authorAkgun, C. O.en_US
dc.contributor.authorKayaci, F.en_US
dc.contributor.authorDonmez, I.en_US
dc.contributor.authorUyar, Tameren_US
dc.contributor.authorBıyıklı, Necmien_US
dc.date.accessioned2016-02-08T09:40:20Z
dc.date.available2016-02-08T09:40:20Z
dc.date.issued2013en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractAluminum nitride (AlN) hollow nanofibers were synthesized via plasma-enhanced atomic layer deposition using sacrificial electrospun polymeric nanofiber templates having different average fiber diameters (~70, ~330, and ~740 nm). Depositions were carried out at 200°C using trimethylaluminum and ammonia precursors. AlN-coated nanofibers were calcined subsequently at 500°C for 2 h to remove the sacrificial polymeric nanofiber template. SEM studies have shown that there is a critical wall thickness value depending on the template's average fiber diameter for AlN hollow nanofibers to preserve their shapes after the template has been removed by calcination. Best morphologies were observed for AlN hollow nanofibers prepared by depositing 800 cycles (corresponding to ~69 nm) on nanofiber templates having ~330 nm average fiber diameter. TEM images indicated uniform wall thicknesses of ~65 nm along the fiber axes for samples prepared using templates having ~70 and ~330 nm average fiber diameters. Synthesized AlN hollow nanofibers were polycrystalline with a hexagonal crystal structure as determined by high-resolution TEM and selected area electron diffraction. Chemical compositions of coated and calcined samples were studied using X-ray photoelectron spectroscopy (XPS). High-resolution XPS spectra confirmed the presence of AlN. © 2012 The American Ceramic Society.en_US
dc.identifier.doi10.1111/jace.12030en_US
dc.identifier.eissn1551-2916
dc.identifier.issn0002-7820
dc.identifier.urihttp://hdl.handle.net/11693/21054
dc.language.isoEnglishen_US
dc.publisherWileyen_US
dc.relation.isversionofhttp://dx.doi.org/10.1111/jace.12030en_US
dc.source.titleJournal of the American Ceramic Societyen_US
dc.titleTemplate-based synthesis of aluminum nitride hollow nanofibers via plasma-enhanced atomic layer depositionen_US
dc.typeArticleen_US

Files

Original bundle

Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
Template-based synthesis of aluminum nitride hollow nanofibers via plasma-enhanced atomic layer deposition.pdf
Size:
1.27 MB
Format:
Adobe Portable Document Format
Description:
Full printable version