Dual integrated actuators for extended range high speed atomic force microscopy

buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1639en_US
dc.citation.issueNumber11en_US
dc.citation.spage1637en_US
dc.citation.volumeNumber75en_US
dc.contributor.authorSulchek, T.en_US
dc.contributor.authorMinne, S. C.en_US
dc.contributor.authorAdams, J. D.en_US
dc.contributor.authorFletcher, D. A.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorQuate, C. F.en_US
dc.contributor.authorAdderton, D. M.en_US
dc.date.accessioned2015-07-28T12:06:38Z
dc.date.available2015-07-28T12:06:38Z
dc.date.issued1999-09-13en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractA flexible system for increasing the throughput of the atomic force microscope without sacrificing imaging range is presented. The system is based on a nested feedback loop which controls a micromachined cantilever that contains both an integrated piezoelectric actuator and an integrated thermal actuator. This combination enables high speed imaging (2 mm/s) over an extended range by utilizing the piezoelectric actuator’s high bandwidth (15 kHz) and thermal actuator’s large response (300 nm/V). A constant force image, where the sample topography exceeds the range of the piezoelectric actuator alone, is presented. It has also been demonstrated that the deflection response of the thermal actuator can be linearized and controlled with an integrated diode.en_US
dc.identifier.doi10.1063/1.124779en_US
dc.identifier.eissn1077-3118
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/13502
dc.language.isoEnglishen_US
dc.publisherA I P Publishing LLCen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.124779en_US
dc.source.titleApplied Physics Lettersen_US
dc.subjectSensorsen_US
dc.titleDual integrated actuators for extended range high speed atomic force microscopyen_US
dc.typeArticleen_US

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