Dual integrated actuators for extended range high speed atomic force microscopy

Abstract

A flexible system for increasing the throughput of the atomic force microscope without sacrificing imaging range is presented. The system is based on a nested feedback loop which controls a micromachined cantilever that contains both an integrated piezoelectric actuator and an integrated thermal actuator. This combination enables high speed imaging (2 mm/s) over an extended range by utilizing the piezoelectric actuator’s high bandwidth (15 kHz) and thermal actuator’s large response (300 nm/V). A constant force image, where the sample topography exceeds the range of the piezoelectric actuator alone, is presented. It has also been demonstrated that the deflection response of the thermal actuator can be linearized and controlled with an integrated diode.