Template-based synthesis of AlN hollow nanofibers via plasma-enhanced atomic layer deposition

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dc.contributor.authorOzgit-Akgun, C.en_US
dc.contributor.authorKayacı, F.en_US
dc.contributor.authorDönmez, İ.en_US
dc.contributor.authorUyar, T.en_US
dc.contributor.authorBıyıklı, N.en_US
dc.coverage.spatialAt Santa Clara, California, USAen_US
dc.date.accessioned2019-07-09T10:11:33Z
dc.date.available2019-07-09T10:11:33Z
dc.date.issued2012en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionDate of Conference: 18-21 June 2012en_US
dc.identifier.urihttp://hdl.handle.net/11693/52177
dc.language.isoEnglishen_US
dc.source.titleTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, TechConnect World Conference and Expo 2012 (Nanotech 2012)en_US
dc.titleTemplate-based synthesis of AlN hollow nanofibers via plasma-enhanced atomic layer depositionen_US
dc.typeConference Paperen_US

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