Comparison of geometric and drive-induced nonlinearities in doubly clamped, thermoelastic nanoelectromechanical systems

buir.contributor.authorHanay, Mehmet Selim
dc.citation.epage271en_US
dc.citation.issueNumber3en_US
dc.citation.spage264en_US
dc.citation.volumeNumber43en_US
dc.contributor.authorHanay, Mehmet Selimen_US
dc.date.accessioned2020-02-24T06:17:46Z
dc.date.available2020-02-24T06:17:46Z
dc.date.issued2019-06
dc.departmentDepartment of Mechanical Engineeringen_US
dc.description.abstractThe performance of resonant sensors based on nanoelectromechanical systems depends critically on the maximum amplitude of oscillation reached in the linear regime. The maximum linear amplitude is determined by nonlinear mechanisms that can originate from the material, geometric and transduction mechanism related factors. Here we compare the two competing effects, the geometric and drive-induced nonlinearities, for a commonly used device family, the thermoelastically driven, doubly clamped beams. We find that the geometric nonlinearity dominates for most of the device designs used in the literature, however the drive-induced nonlinearity becomes the determining factor for thicker beams with small electrode lengths.en_US
dc.description.provenanceSubmitted by Evrim Ergin (eergin@bilkent.edu.tr) on 2020-02-24T06:17:46Z No. of bitstreams: 1 Comparison_of_geometric_and_drive-induced_nonlinearities_in_doubly_clamped_thermoelastic_nanoelectromechanical_systems.pdf: 993725 bytes, checksum: 4b84fa723d3b1924ac575822c0ab2bc7 (MD5)en
dc.description.provenanceMade available in DSpace on 2020-02-24T06:17:46Z (GMT). No. of bitstreams: 1 Comparison_of_geometric_and_drive-induced_nonlinearities_in_doubly_clamped_thermoelastic_nanoelectromechanical_systems.pdf: 993725 bytes, checksum: 4b84fa723d3b1924ac575822c0ab2bc7 (MD5) Previous issue date: 2019-06en
dc.identifier.doi10.3906/fiz-1812-21en_US
dc.identifier.issn1300-0101
dc.identifier.urihttp://hdl.handle.net/11693/53473
dc.language.isoEnglishen_US
dc.publisherTÜBİTAKen_US
dc.relation.isversionofhttps://dx.doi.org/10.3906/fiz-1812-21en_US
dc.source.titleTurkish Journal of Physicsen_US
dc.subjectNanoelectromechanical systemsen_US
dc.subjectNonlinearityen_US
dc.subjectMass sensingen_US
dc.subjectDuffing nonlinearityen_US
dc.titleComparison of geometric and drive-induced nonlinearities in doubly clamped, thermoelastic nanoelectromechanical systemsen_US
dc.typeArticleen_US

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