Integrated asymmetric vertical coupler pressure sensors

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buir.contributor.authorAydınlı, Atilla
dc.citation.epage35en_US
dc.citation.spage27en_US
dc.citation.volumeNumber5455en_US
dc.contributor.authorKıyat, İsaen_US
dc.contributor.authorKocabaş, Aşkınen_US
dc.contributor.authorAkçağ, İmranen_US
dc.contributor.authorAydınlı, Atillaen_US
dc.coverage.spatialStrasbourg, Franceen_US
dc.date.accessioned2016-02-08T11:52:30Zen_US
dc.date.available2016-02-08T11:52:30Zen_US
dc.date.issued2004en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.descriptionDate of Conference: 26-30 April 2004en_US
dc.descriptionConference Name: SPIE Photonics Europe, 2004en_US
dc.description.abstractDesign and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.en_US
dc.identifier.doi10.1117/12.546070en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11693/27403en_US
dc.language.isoEnglishen_US
dc.publisherSPIEen_US
dc.relation.isversionofhttps://doi.org/10.1117/12.546070en_US
dc.source.titleProceedings of SPIE Vol. 5455, MEMS, MOEMS, and Micromachiningen_US
dc.subjectIntegrated opticsen_US
dc.subjectPressure sensoren_US
dc.subjectStress-optic effecten_US
dc.subjectWavelength-selective coupleren_US
dc.subjectComputer simulationen_US
dc.subjectDifferential equationsen_US
dc.subjectElectromagnetic wavesen_US
dc.subjectFinite element methoden_US
dc.titleIntegrated asymmetric vertical coupler pressure sensorsen_US
dc.typeConference Paperen_US

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