Integrated asymmetric vertical coupler pressure sensors
Date
2004
Advisor
Instructor
Source Title
Proceedings of SPIE Vol. 5455, MEMS, MOEMS, and Micromachining
Print ISSN
0277-786X
Electronic ISSN
Publisher
SPIE
Volume
5455
Issue
Pages
27 - 35
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.
Course
Other identifiers
Book Title
Keywords
Integrated optics, Pressure sensor, Stress-optic effect, Wavelength-selective coupler, Computer simulation, Differential equations, Electromagnetic waves, Finite element method