Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1374en_US
dc.citation.issueNumber6en_US
dc.citation.spage1364en_US
dc.citation.volumeNumber46en_US
dc.contributor.authorBozkurt, A.en_US
dc.contributor.authorLadabaum, I.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKhuri-Yakub, B. T.en_US
dc.date.accessioned2015-07-28T11:56:58Z
dc.date.available2015-07-28T11:56:58Z
dc.date.issued1999-11en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractTheoretical analysis and computer simulations of capacitive microfabricated ultrasonic transducers indicate that device performance can be optimized through judicious patterning of electrodes. The conceptual basis of the analysis is that electrostatic force should be applied only where it is most effective, such as at the center of a circular membrane. If breakdown mechanisms are ignored, an infinitesimally small electrode with an infinite bias voltage results in the optimal transducer, A more realistic design example compares the 3-dB bandwidths of a fully metalized transducer and a partially metalized transducer, each tuned with a lossless Butterworth network. It is found that the bandwidth of the optimally metalized device is twice that of the fully metalized device.en_US
dc.identifier.doi10.1109/58.808859en_US
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/11141
dc.language.isoEnglishen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/58.808859en_US
dc.source.titleIEEE Trans on Ultrasonics, Ferroelectrics and Frequency Conten_US
dc.subjectAiren_US
dc.titleTheory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducersen_US
dc.typeArticleen_US

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