Mathematical model of nonlinear laser lithography

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buir.contributor.authorYavuz, Özgün
buir.contributor.authorPavlov, Ihor
buir.contributor.authorİlday, F. Ömer
dc.citation.spageCM_P_18en_US
dc.contributor.authorYavuz, Özgünen_US
dc.contributor.authorErgecen, E.en_US
dc.contributor.authorTokel, Onuren_US
dc.contributor.authorPavlov, Ihoren_US
dc.contributor.authorİlday, F. Ömeren_US
dc.coverage.spatialMunich, Germanyen_US
dc.date.accessioned2020-01-30T11:54:28Z
dc.date.available2020-01-30T11:54:28Z
dc.date.issued2015
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.descriptionDate of Conference: 21–25 June 2015en_US
dc.descriptionConference Name: 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conferenceen_US
dc.description.abstractLaser induced periodic surface structures (LIPSS) had been observed just five years after the invention of laser [1]. Among the numerous LIPSS techniques none of them could maintain long-range order [2]. However, it has recently been demonstrated that long order periodic surface structures can be produced using nonlinear laser lithography (NLL) [3]. Here, we present a mathematical foundation for NLL.en_US
dc.description.provenanceSubmitted by Onur Emek (onur.emek@bilkent.edu.tr) on 2020-01-30T11:54:27Z No. of bitstreams: 1 Mathematical_model_of_nonlinear_laser_lithography.pdf: 2405534 bytes, checksum: cda1d4c71fee98003aeedc8d6e33973e (MD5)en
dc.description.provenanceMade available in DSpace on 2020-01-30T11:54:28Z (GMT). No. of bitstreams: 1 Mathematical_model_of_nonlinear_laser_lithography.pdf: 2405534 bytes, checksum: cda1d4c71fee98003aeedc8d6e33973e (MD5) Previous issue date: 2015en
dc.identifier.isbn9781467374750
dc.identifier.urihttp://hdl.handle.net/11693/52932
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.source.titleThe European Conference on Lasers and Electro-Optics 2015en_US
dc.titleMathematical model of nonlinear laser lithographyen_US
dc.typeConference Paperen_US

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