Mathematical model of nonlinear laser lithography
Date
2015
Editor(s)
Advisor
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
The European Conference on Lasers and Electro-Optics 2015
Print ISSN
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
CM_P_18
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Series
Abstract
Laser induced periodic surface structures (LIPSS) had been observed just five years after the invention of laser [1]. Among the numerous LIPSS techniques none of them could maintain long-range order [2]. However, it has recently been demonstrated that long order periodic surface structures can be produced using nonlinear laser lithography (NLL) [3]. Here, we present a mathematical foundation for NLL.