Mathematical model of nonlinear laser lithography

Date
2015
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Source Title
The European Conference on Lasers and Electro-Optics 2015
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IEEE
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CM_P_18
Language
English
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Abstract

Laser induced periodic surface structures (LIPSS) had been observed just five years after the invention of laser [1]. Among the numerous LIPSS techniques none of them could maintain long-range order [2]. However, it has recently been demonstrated that long order periodic surface structures can be produced using nonlinear laser lithography (NLL) [3]. Here, we present a mathematical foundation for NLL.

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