Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis

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buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.citation.epage58en_US
dc.citation.issueNumber1en_US
dc.citation.spage46en_US
dc.citation.volumeNumber446en_US
dc.contributor.authorOzer, Z.en_US
dc.contributor.authorMamedov, Amirullah M.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.date.accessioned2016-02-08T12:04:15Z
dc.date.available2016-02-08T12:04:15Z
dc.date.issued2013-09-23en_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.description.abstractThis paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed. Copyright © Taylor & Francis Group, LLC.en_US
dc.identifier.doi10.1080/00150193.2013.821002en_US
dc.identifier.eissn1563-5112
dc.identifier.issn0015-0193
dc.identifier.urihttp://hdl.handle.net/11693/27898
dc.language.isoEnglishen_US
dc.publisherTaylor and Francisen_US
dc.relation.isversionofhttp://dx.doi.org/10.1080/00150193.2013.821002en_US
dc.source.titleFerroelectricsen_US
dc.subjectFEMen_US
dc.subjectFerroelectricsen_US
dc.subjectGyroscopeen_US
dc.subjectConceptual frameworksen_US
dc.subjectCritical analysisen_US
dc.subjectDesign and modelingen_US
dc.subjectFailure mechanismen_US
dc.subjectFerroelectric compoundsen_US
dc.subjectMicro-gyroscopeen_US
dc.subjectModel and simulationen_US
dc.subjectNovel structuresen_US
dc.subjectComputer simulationen_US
dc.subjectFerroelectricityen_US
dc.subjectFinite element methoden_US
dc.subjectGyroscopesen_US
dc.subjectMEMSen_US
dc.subjectFerroelectric materialsen_US
dc.titleModeling and simulation of the ferroelectric based micro gyroscope: FEM analysisen_US
dc.typeArticleen_US

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