Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis
Date
2013-09-23
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Source Title
Ferroelectrics
Print ISSN
0015-0193
Electronic ISSN
1563-5112
Publisher
Taylor and Francis
Volume
446
Issue
1
Pages
46 - 58
Language
English
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Abstract
This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed. Copyright © Taylor & Francis Group, LLC.
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Keywords
FEM , Ferroelectrics , Gyroscope , Conceptual frameworks , Critical analysis , Design and modeling , Failure mechanism , Ferroelectric compounds , Micro-gyroscope , Model and simulation , Novel structures , Computer simulation , Ferroelectricity , Finite element method , Gyroscopes , MEMS , Ferroelectric materials