Ultrafast micromachining of Cu and Si at ultra-high repetition rates with pulse bursts

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Ultrafast micromachining of Cu and Si at ultra-high repetition rates with pulse bursts.pdf (518.82 KB)

Date

2016

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2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

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IEEE

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English

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Conference Paper

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Abstract

We report a novel ultrafast burst mode fiber laser system, which can deliver pulses at ultra-high repetition rates in order to systematically investigate micromachining efficiency on copper and silicon samples. © 2015 IEEE.

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Composite micromechanics, Fiber lasers, Micromachining, Burst mode, Laser systems, Silicon samples, Ultra-fast, Ultra-high, Pulse repetition rate

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http://hdl.handle.net/11693/37754

Published Version (Please cite this version)

http://dx.doi.org/10.1109/CLEOPR.2015.7376419

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Scholarly Publications - Electrical and Electronics Engineering
Scholarly Publications - UNAM