A new detection method for capacitive micromachined ultrasonic transducers
buir.contributor.author | Özbay, Ekmel | |
buir.contributor.orcid | Özbay, Ekmel|0000-0003-2953-1828 | |
dc.citation.epage | 1010 | en_US |
dc.citation.spage | 1007 | en_US |
dc.citation.volumeNumber | 2 | en_US |
dc.contributor.author | Ergun, A. S. | en_US |
dc.contributor.author | Temelkuran, B. | en_US |
dc.contributor.author | Özbay, Ekmel | en_US |
dc.contributor.author | Atalar, Abdullah | en_US |
dc.date.accessioned | 2016-02-08T10:43:49Z | |
dc.date.available | 2016-02-08T10:43:49Z | |
dc.date.issued | 1998 | en_US |
dc.department | Department of Electrical and Electronics Engineering | en_US |
dc.department | Department of Physics | en_US |
dc.description.abstract | Capacitive micromachined ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They usually consist of many small membranes all in parallel. In this work we report a new detection method for cMUT's. We arrange the membranes in the form of an artificial transmission line by inserting small inductances between the membranes. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the total capacitance and the frequency of the signal through it. By measuring the electrical length of the artificial line at a RF frequency in the GHz range, the vibrations of the membranes can be detected in a very sensitive manner. For the detector structure we considered a minimum detectable displacement in the order of 10-7 angstroms/√Hz is expected. | en_US |
dc.description.provenance | Made available in DSpace on 2016-02-08T10:43:49Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 1998 | en |
dc.identifier.issn | 1051-0117 | |
dc.identifier.uri | http://hdl.handle.net/11693/25384 | |
dc.language.iso | English | en_US |
dc.publisher | IEEE | en_US |
dc.source.title | Proceedings of the IEEE Ultrasonics Symposium | en_US |
dc.subject | Capacitance | en_US |
dc.subject | Capacitors | en_US |
dc.subject | Nondestructive examination | en_US |
dc.subject | Ultrasonic measurement | en_US |
dc.subject | Ultrasonic testing | en_US |
dc.subject | Vibrations (mechanical) | en_US |
dc.subject | Capacitive micromachined ultrasonic transducers (cMUT) | en_US |
dc.subject | Displacement sensing | en_US |
dc.subject | Ultrasonic detection | en_US |
dc.subject | Ultrasonic transducers | en_US |
dc.title | A new detection method for capacitive micromachined ultrasonic transducers | en_US |
dc.type | Article | en_US |
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