A new detection method for capacitive micromachined ultrasonic transducers

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buir.contributor.authorÖzbay, Ekmel
buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.citation.epage1010en_US
dc.citation.spage1007en_US
dc.citation.volumeNumber2en_US
dc.contributor.authorErgun, A. S.en_US
dc.contributor.authorTemelkuran, B.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.date.accessioned2016-02-08T10:43:49Z
dc.date.available2016-02-08T10:43:49Z
dc.date.issued1998en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.description.abstractCapacitive micromachined ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They usually consist of many small membranes all in parallel. In this work we report a new detection method for cMUT's. We arrange the membranes in the form of an artificial transmission line by inserting small inductances between the membranes. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the total capacitance and the frequency of the signal through it. By measuring the electrical length of the artificial line at a RF frequency in the GHz range, the vibrations of the membranes can be detected in a very sensitive manner. For the detector structure we considered a minimum detectable displacement in the order of 10-7 angstroms/√Hz is expected.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T10:43:49Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 1998en
dc.identifier.issn1051-0117
dc.identifier.urihttp://hdl.handle.net/11693/25384
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.source.titleProceedings of the IEEE Ultrasonics Symposiumen_US
dc.subjectCapacitanceen_US
dc.subjectCapacitorsen_US
dc.subjectNondestructive examinationen_US
dc.subjectUltrasonic measurementen_US
dc.subjectUltrasonic testingen_US
dc.subjectVibrations (mechanical)en_US
dc.subjectCapacitive micromachined ultrasonic transducers (cMUT)en_US
dc.subjectDisplacement sensingen_US
dc.subjectUltrasonic detectionen_US
dc.subjectUltrasonic transducersen_US
dc.titleA new detection method for capacitive micromachined ultrasonic transducersen_US
dc.typeArticleen_US

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