A new detection method for capacitive micromachined ultrasonic transducers

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A new detection method for capacitive micromachined ultrasonic transducers.pdf (274.54 KB)

Date

1998

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Abstract

Source Title

Proceedings of the IEEE Ultrasonics Symposium

Publisher

IEEE

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Keywords

Capacitance, Capacitors, Nondestructive examination, Ultrasonic measurement, Ultrasonic testing, Vibrations (mechanical), Capacitive micromachined ultrasonic transducers (cMUT), Displacement sensing, Ultrasonic detection, Ultrasonic transducers

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http://hdl.handle.net/11693/25384

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Scholarly Publications - Electrical and Electronics Engineering
Scholarly Publications - Physics

Language

English

Type

Article

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