High-speed resonant-cavity-enhanced Schottky photodiodes

Date
1998
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Source Title
Proceedings of the Conference on Lasers and Electro-Optics, CLEO 1998
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Publisher
IEEE
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Pages
500
Language
English
Type
Conference Paper
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Abstract

The top-illuminated Schottky photodiodes were fabricated by a microwave-compatible monolithic microfabrication process. Fabrication started with formation of ohmic contacts to n+ layers. Mesa isolation was followed by a Ti-Au interconnect metallization. Following this, a semitransparent Au Schottky metal and a silicon nitride layer was deposited. Finally, a thick Ti-Au layer was deposited to form an air bridge connection between the interconnect and the Schottky metal. The optical properties of the photodiodes were simulated using a transfer matrix method.

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Keywords
Capacitors, Fabrication, Fourier transforms, Light sources, Monochromators, Ohmic contacts, Optical communication, Optical interconnects, Optical properties, Photodetectors, Quantum efficiency, Resonance, Resonant cavity enhanced photodetectors, Schottky photodiodes, Photodiodes
Citation
Published Version (Please cite this version)