A new route for fabricating on-chip chalcogenide microcavity resonator arrays

Abstract

High-yield production and on-chip integration of high-Q chalcogenide microresonators with various sizes and geometrical shapes (spherical, spheroidal, and ellipsoidal) and with sub-nanometer surface roughness is achieved. The high-throughput and low-cost production of chalcogenide spherical microresonators works via inducing a Plateau-Rayleigh instability within a multimaterial fiber in extended lengths. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.