A ring gyroscope with on-chip capacitive stress compensation

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buir.contributor.authorUzunoğlu, Baha Erim
buir.contributor.authorErkan, Derin
buir.contributor.authorTatar, Erdinç
buir.contributor.orcidUzunoğlu Baha Erim|0000-0001-6436-5146
buir.contributor.orcidErkan, Derin|0000-0002-7907-8788
buir.contributor.orcidTatar, Erdinç|0000-0002-6093-4994
dc.citation.epage752en_US
dc.citation.issueNumber5en_US
dc.citation.spage741en_US
dc.citation.volumeNumber31en_US
dc.contributor.authorUzunoğlu, Baha Erim
dc.contributor.authorErkan, Derin
dc.contributor.authorTatar, Erdinç
dc.date.accessioned2023-02-28T10:13:05Z
dc.date.available2023-02-28T10:13:05Z
dc.date.issued2022-08-18
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractWe present long-term stress compensation results for a 3.2mm diameter ring gyroscope integrated with 16 capacitive stress sensors for the first time in this work. A bridge-type capacitive sensor is preferred due to its compact size and temperature insensitivity for on-chip stress measurements. The ring design enables a high level of integration and stress sensor-gyroscope output correlation. We first demonstrate the stress sensor operation on a stress test-bed. The drift test for sixteen days at mismatched mode and the drift test for eight days at matched mode in room temperature reveal that the stress compensation can eliminate the gyroscope drift. The stability of the stress compensated gyroscope output can reach 0.008°/h in mismatched mode and 0.003°/h in matched mode at an averaging time of two days with no signs of long-term drift. High gyroscope stability is achieved with a partial least-squares fitting algorithm; however, we believe that stress and gyroscope output relation might be linear time-variant with possible nonlinear and hysteresis effects. Analysis of the drive and sense mode frequencies shows that only temperature cannot explain the frequency variations, and the inclusion of stress can comprehensively describe the frequency changes.en_US
dc.identifier.doi10.1109/JMEMS.2022.3197341en_US
dc.identifier.eissn1941-0158
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/11693/111901
dc.language.isoEnglishen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttps://doi.org/10.1109/JMEMS.2022.3197341en_US
dc.source.titleJournal of Microelectromechanical Systemsen_US
dc.subjectMEMS inertial sensorsen_US
dc.subjectRing gyroscopeen_US
dc.subjectStress sensoren_US
dc.subjectDriften_US
dc.subjectStress compensationen_US
dc.titleA ring gyroscope with on-chip capacitive stress compensationen_US
dc.typeArticleen_US

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