High‐speed atomic force microscopy using an integrated actuator and optical lever detection

Abstract

A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is primarily limited by a mechanical resonance of 77 kHz when the cantilever is placed in contact with a surface. Images scanned with a tip velocity of 1 cm/s have been obtained in the constant force mode by using the optical lever to measure the cantilever stress. This is accomplished by subtracting an unwanted deflection produced by the actuator from the net deflection measured by the photodiode using a linear correction circuit. We have verified that the tip/sample force is constant by monitoring the cantilever stress with an implanted piezoresistor.