Development of a modular single-axis slider for high precision positioning applications

Abstract

In this paper, design and implementation of a modular single-axis micro/nano-positioning system which is driven by a permanent magnet linear motor is presented. The system is represented by modest amount of effort for mathematical modeling which is improved by series of experiments on open loop characteristics. Moreover, the system is proposed to be controlled by a PID controller. Conventional point to point position control, velocity control with trajectory planning and position control with trajectory planning approaches are accomplished and compared in terms of their suitability to the proposed system. The comparisons are supported by experimental results obtained with the single-axis slider mechanism. Using the position control with trajectory planning, better performance characteristics are observed. Moreover, experimental results have shown that trajectory planning approaches are more suitable for precision positioning applications due to their smooth motion characteristics.