Browsing by Subject "Sensor Array"

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    Integration of through-wafer interconnects with a two-dimensional cantilever array
    (Elsevier, 2000-05-22) Chow, E. M.; Soh, H. T.; Lee, H. C.; Adams, J. D.; Minne, S. C.; Yaralioglu, G. G.; Atalar, Abdullah; Quate, C. F.; Kenny, T. W.
    High-density through-wafer interconnects are incorporated in a two-dimensional (2D) micromachined cantilever array. The design addresses alignment and density issues associated with 2D arrays. Each cantilever has piezoresistive deflection sensors and high-aspect ratio silicon tips. The fabrication process and array operation are described. The integration of cantilevers, tips, and interconnects enables operation of a high-density 2D scanning probe array over large areas.