Browsing by Subject "Reactive ion etching (RIE)"

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    High-speed characterization of solar-blind AlxGa 1-xN p-i-n photodiodes
    (Institute of Physics, 2004) Bıyıklı, Necmi; Kimukin, I.; Tut, T.; Kartaloglu, T.; Aytur, O.; Özbay, Ekmel
    We report on the temporal pulse response measurements of solar-blind AlxGa1-xN-based heterojunction p-i-n photodiodes. High-speed characterization of the fabricated photodiodes was carried out at 267 nm. The bandwidth performance was enhanced by an order of magnitude with the removal of the absorbing p+ GaN cap layer. 30 μm diameter devices exhibited pulse responses with ∼70 ps pulse width and a corresponding 3 dB bandwidth of 1.65 GHz.