Browsing by Subject "Oxide films"
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Item Open Access Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: A case study for metal oxides(American Chemical Society, 2016) Haider, A.; Deminskyi, P.; Khan, T. M.; Eren, H.; Bıyıklı, NecmiArea-selective atomic layer deposition (AS-ALD) has attracted immense attention in recent years for self-aligned accurate pattern placement with subnanometer thickness control. Here, we demonstrate a methodology to achieve AS-ALD by using inductively couple plasma (ICP) grown fluorocarbon polymer film as hydrophobic blocking layer for selective deposition. Our approach has been tested for metal-oxide materials including ZnO, Al2O3, and HfO2. Contact angle, X-ray photoelectron spectroscopy (XPS), spectroscopic ellipsometer, and scanning electron microscopy (SEM) measurements were performed to investigate the blocking ability of plasma polymerized fluorocarbon layers against ALD-grown metal-oxide films. A considerable growth inhibition for ZnO has been observed on fluorocarbon coated Si(100) surfaces, while the same polymerized surface caused a relatively slow nucleation for HfO2 films. No growth selectivity was obtained for Al2O3 films, displaying almost the same nucleation behavior on Si and fluorocarbon surfaces. Thin film patterning has been demonstrated using this strategy by growing ZnO on lithographically patterned fluorocarbon/Si samples. High resolution SEM images and XPS line scan confirmed the successful patterning of ZnO up to a film thickness of ∼15 nm. © 2016 American Chemical Society.Item Open Access Continuous mesoporous pd films by electrochemical deposition in nonionic micellar solution(American Chemical Society, 2017) Iqbal, M.; Li C.; Wood, K.; Jiang B.; Takei, T.; Dag, Ö.; Baba, D.; Nugraha, A. S.; Asahi, T.; Whitten, A. E.; Hossain, M. S. A.; Malgras, V.; Yamauchi, Y.Mesoporous metals that combine catalytic activity and high surface area can provide more opportunities for electrochemical applications. Various synthetic methods, including hard and soft templating, have been developed to prepare mesoporous/nanoporous metals. Micelle assembly, typically involved in soft-templates, is flexible and convenient for such purposes. It is, however, difficult to control, and the ordering is significantly destroyed during the metal deposition process, which is detrimental when it comes to designing precisely mesostructured materials. In the present work, mesoporous Pd films were uniformly electrodeposited using a nonionic surfactant, triblock copolymer poly(ethylene oxide)-b-poly(propylene oxide)-b-poly(ethylene oxide), as a pore-directing agent. The interaction between micelles and metal precursors greatly influences the metal growth and determines the final structure. The water-coordinated species interact with the ethylene oxide moiety of the micelles to effectively drive the Pd(II) species toward the working electrode surface. From small-angle neutron scattering data, it is found that spherical P123 micelles, with an average diameter of ∼14 nm, are formed in the electrolyte, and the addition of Pd ions does not significantly modify their structure, which is the essence of the micelle assembly approach. The uniformly sized mesopores are formed over the entire mesoporous Pd film and have an average pore diameter of 10.9 nm. Cross-sectional observation of the film also shows mesopores spanning continuously from the bottom to the top of the film. The crystallinity, crystal phase, and electronic coordination state of the Pd film are also confirmed. Through this study, it is found that the optimized surfactant concentration and applied deposition potential are the key factors to govern the formation of homogeneous and well-distributed pores over the entire film. Interestingly, the as-prepared mesoporous Pd films exhibit superior electrocatalytic activity toward the ethanol oxidation reaction by fully utilizing the accessible active surface area. Our approach combines electrochemistry with colloidal and coordination chemistry and is widely applicable to other promising metals and alloy electrocatalysts.Item Open Access Investigation of native oxide removing from HCPA ALD grown GaN thin films surface utilizing HF solutions(IEEE, 2016) Deminskyi, Petro; Haider, Ali; Bıyıklı, Necmi; Ovsianitsky, A.; Tsymbalenko, A.; Kotov, D.; Matkivskyi, V.; Liakhova, N.; Osinsky, V.The paper consider oxygen contamination of HCPA ALD grown GaN films under an air conditioning and during different time duration. High resolution XPS analysis of HCPA ALD grown GaN films after diluted 1:10 HF(41 %) : H2O and undiluted HF (41 %) influence on oxygen impurities was investigated. Lesser oxygen impurities have been observed. Better resistivity to oxygen atoms of GaN thin films after diluted HF solution treatment was achieved compared to undiluted HF treatment and without treatment.Item Open Access Reversible electrical reduction and oxidation of graphene oxide(American Chemical Society, 2011) Ekiz, O. O.; Ürel, M.; Güner, H.; Mizrak, A. K.; Dâna, A.We demonstrate that graphene oxide can be reversibly reduced and oxidized using electrical stimulus. Controlled reduction and oxidation in two-terminal devices containing multilayer graphene oxide films are shown to result in switching between partially reduced graphene oxide and graphene, a process which modifies the electronic and optical properties. High-resolution tunneling current and electrostatic force imaging reveal that graphene oxide islands are formed on multilayer graphene, turning graphene into a self-assembled heterostructure random nanomesh. Charge storage and resistive switching behavior is observed in two-terminal devices made of multilayer graphene oxide films, correlated with electrochromic effects. Tip-induced reduction and oxidation are also demonstrated. Results are discussed in terms of thermodynamics of oxidation and reduction reactions. © 2011 American Chemical Society.Item Open Access Synthesis and optical properties of Co and Zn-based metal oxide nanoparticle thin films(Polish Academy of Sciences, 2017) Gungor, E.; Gungor, T.; Calıskan, D.; Özbay, EkmelZnO, Co doped ZnO (ZnO:Co) and CoO thin films were deposited on glass substrates by using the spark discharge technique with Zn-Zn, Zn-Co and Co-Co metal electrodes (tips). The structural and optical properties of the films were characterized by X-ray diffraction, scanning electron microscopy measurements and UV-Vis spectrometry. Cubic phase reflection of CoO (200) was observed in the samples containing Co. The size of nanoparticles had varied between 38 nm and 200 nm in ZnO thin films. When Co electrode was used, spherical structure had deteriorated and clusters of particles, with smaller radii, were observed. In addition, when Co-Co electrode pairs were used, various cavities with different sizes were formed. Especially, it was observed that the optical transmittance had generally increased with the decreasing spark (charge) voltage, while increasing with the number of sparks. The Co-containing samples were green in color and it was observed that the loss of transmission appears in a specific region in the Co-doped ZnO thin films due to characteristic d-d transition of Co2+ ions. The thickness of the films had decreased with the increasing number of sparks. In addition, the band gap energy, Eg, evaluated by UV-Vis spectroscopy measurements has been shifted to higher wavelengths (red shift) for the ZnO:Co thin films.