Browsing by Subject "Nanocantilevers"

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    Continuously tunable terahertz metamaterial employing magnetically actuated cantilevers
    (Optical Society of American (OSA), 2011) Ozbey, B.; Aktas O.
    Terahertz metamaterial structures that employ flexing microelectromechanical cantilevers for tuning the resonance frequency of an electric split-ring resonator are presented. The tuning cantilevers are coated with a magnetic thin-film and are actuated by an external magnetic field. The use of cantilevers enables continuous tuning of the resonance frequency over a large frequency range. The use of an externally applied magnetic field for actuation simplifies the metamaterial structure and its use for sensor or filter applications. A structure for minimizing the actuating field is derived. The dependence of the tunable bandwidth on frequency is discussed. © 2011 Optical Society of America.
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    Harmonic cantilevers for nanomechanical sensing of elastic properties
    (IEEE, 2003-06) Şahin, O.; Yaralıoğlu, G.; Grow, R.; Zappe, S. F.; Atalar, Abdullah; Quate, C.; Solgaard, O.
    We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.
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    Low-voltage small-size double-arm MEMS actuator
    (2009) Bıyıklı, Necmi; Damgaci, Y.; Cetiner, B.A.
    The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using a microwave-compatible fabrication process. Owing to its small size, cantilever length (L=5-50m) and width (W=2-40m), i.e. ∼10-100 times smaller in lateral dimensions than a standard MEMS actuator, this actuator showed actuation voltages lower than 10 V. RF measurements of the 10m-wide actuators yielded an average insertion loss less than 1dB and isolation higher than 40dB up to 25GHz. The developed actuator is well suited for integration in reconfigurable microwave circuits and systems such as reconfigurable antennas and arrays. © 2009 The Institution of Engineering and Technology.