Harmonic cantilevers for nanomechanical sensing of elastic properties
Date
2003-06
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TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
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IEEE
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Pages
1124 - 1127
Language
English
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Abstract
We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.
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Keywords
Nanobioscience, Resonant frequency, Actuators, Atomic force microscopy, Elasticity, Microsystems, Nanocantilevers, Natural frequencies, Probes, Resonance, Surface topography, Transducers, Vibrations (mechanical), Fundamental resonance frequency, Mechanical factors, Mechanical interactions, Nanobiosciences, Nanomechanical sensing, Optical imaging, Tapping-mode atomic force microscopy, Vibrations, Solid-state sensors