Browsing by Subject "Micromachined two-dimensional array"

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    Micromachined two-dimensional array piezoelectrically actuated transducers
    (A I P Publishing LLC, 1998-03-16) Perçin, G.; Atalar, Abdullah; Degertekin, L.; Khuri-Yakub, B. T.
    This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.

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