Browsing by Subject "Micromachined two-dimensional array"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Thumbnail Image
    ItemOpen Access
    Micromachined two-dimensional array piezoelectrically actuated transducers
    (A I P Publishing LLC, 1998-03-16) Perçin, G.; Atalar, Abdullah; Degertekin, L.; Khuri-Yakub, B. T.
    This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.