Browsing by Subject "Integrated Optics"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Thumbnail Image
    ItemOpen Access
    Grating loaded integrated optical cantilevers
    (2010) Karademir, Ertuğrul
    Cantilever beams are the most important parts of standard scanning probe microscopy. In this work, an integrated optical approach to sense the deflection of a cantilever beam is suggested and realized. A grating coupler loaded on the upper surface of the cantilever beam couples the incident light to the chip, which is then conveyed through a taper structure to a waveguide to be detected by a photodiode. Deflections of the cantilever beam change the optical path and hence the total transmitted intensity. Finally an optical signal is produced and this signal is measured. Resonance peak of 27.2 Q factor is obtained, which could be further enhanced by proper vibration isolation and employment of vacuum environment.