Browsing by Subject "In-situ process"

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    Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers
    (Elsevier, 2013) Yu, H. -Y.; Battal, E.; Okyay, Ali Kemal; Shim, J.; Park J. -H.; Baek, J. W.; Saraswat, K. C.
    We investigate phosphorus in-situ doping characteristics in germanium (Ge) during epitaxial growth by spreading resistance profiling analysis. In addition, we present an accurate model for the kinetics of the diffusion in the in-situ process, modeling combined growth and diffusion events. The activation energy and pre-exponential factor for phosphorus (P) diffusion are determined to be 1.91 eV and 3.75 × 10-5 cm2/s. These results show that P in-situ doping diffusivity is low enough to form shallow junctions for high performance Ge devices.