Browsing by Subject "Experimental characterization"
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Item Open Access Experimental characterization of capacitive micromachined ultrasonic transducers(IEEE, 2007) Ölçüm, Selim; Atalar, Abdullah; Köymen, Hayrettin; Oğuz, Kağan; Şenlik, Muhammed N.In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.