Browsing by Subject "Bending vibrations"

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    Structural and loss characterization of SiON layers for optical waveguide applications
    (IEEE, 2000) Ay, Feridun; Aydınlı, Atilla; Roeloffzen, C.; Driessen, A.
    Silicon oxynitride films for optical waveguide applications were grown at 350°C in a PECVD reactor. ATR-FTIR spectroscopy was used to identify the bond structure and absorption characteristics in the mid-infrared region. Annealing of the films was performed together with close monitoring of the N-H bond at 3400 cm-1 and correlated with optical loss measurements. The possibility of a new method for the reduction of the N-H bonds without annealing is discussed.