Browsing by Subject "Airborne"

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    Beam steering in a half-frequency driven airborne CMUT transmitter array
    (IEEE Computer Society, 2019) Khan, Talha Masood; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, Hayrettin
    An airborne Capacitive Micromachined Ultrasonic Transducer (CMUT) transmit array was designed using electromechanical modelling for unbiased airborne operation. The array elements are designed for maximum swing at 10V p-p unbiased drive, whereas conventional practice is to bias CMUT close to the collapsed voltage to achieve higher swing. The devices were fabricated using a customized single photolithographic process with a combination of wet and dry etching. The wafer level fabrication enabled the usage of 2x2 and 3x3 arrays. Driving CMUTs in an unbiased mode at half frequency drives the ‘static pressure’ depressed silicon membrane at a larger swing without letting it collapse. The 2x2 array displays 3.375 kHz bandwidth when characterized in air. The phase and amplitude differences due to the dispersion of resonance frequencies of the elements are compensated for beamformed and beamsteered airborne operation.
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    ItemOpen Access
    Unbiased charged circular CMUT microphone: lumped-element modeling and performance
    (Institute of Electrical and Electronics Engineers, 2018) Köymen, Hayrettin; Atalar, Abdullah; Güler, S.; Köymen, I.; Taşdelen, A. S.; Ünlügedik, A.
    An energy-consistent lumped-element equivalent circuit model for charged circular capacitive micromachined ultrasonic transducer (CMUT) cell is derived and presented. It is analytically shown and experimentally verified that a series dc voltage source at the electrical terminals is sufficient to model the charging in CMUT. A model-based method for determining this potential from impedance measurements at low bias voltages is presented. The model is validated experimentally using an airborne CMUT, which resonates at 103 kHz. Impedance measurements, reception measurements at resonance and off-resonance, and the transient response of the CMUT are compared with the model predictions.