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      Broadband absorption enhancement in an uncooled microbolometer infrared detector

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      Author
      Kebapcı, B.
      Dervişoğlu, Ö.
      Battal, Enes
      Okyay, Ali Kemal
      Akın, T.
      Date
      2014
      Source Title
      Proceedings of SPIE Vol. 9070, Infrared Technology and Applications XL
      Print ISSN
      0277-786X
      Publisher
      SPIE
      Volume
      9070
      Pages
      1 - 8
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      This paper introduces a method for a broadband absorption enhancement in the LWIR range (8-12 μm), in single layer microbolometer pixels with 35 μm pitch. For the first time in the literature, this study introduces a very simple and low cost approach to enhance the absorption by embedding plasmonic structures at the same level as the already existing metallic layer of a microbolometer pixel. The metal layer comprises the electrode and the arm structures on the body. Even though the periodicity of the plasmonic structures is slightly disturbed by the placement of the electrodes and the connecting metal, the metal arms and the electrodes compensate for the lack of the periodicity contributing to the resonance by their coupling with the individual plasmonic resonators. Various plasmonic structures are designed with FDTD simulations. Individual, plasmonically modified microbolometer pixels are fabricated, and an increase in the average absorption due to surface plasmon excitation at Au/Si3N4 interfaces is observed. Plasmonic structures increase the average absorption from 78% to 82% and result in an overall enhancement of 5.1%. A good agreement between the simulation and the FTIR measurement results are obtained within the LWIR range. This work paves the way for integration of the plasmonic structures within conventional microbolometer devices for performance enhancement without introducing additional costs.
      Keywords
      Absorption enhancement
      Broadband
      LWIR
      Microbolometers
      Surface plasmons
      Bolometers
      Electrodes
      Infrared radiation
      Permalink
      http://hdl.handle.net/11693/27871
      Published Version (Please cite this version)
      http://dx.doi.org/10.1117/12.2069937
      Collections
      • Department of Electrical and Electronics Engineering 3601
      • Institute of Materials Science and Nanotechnology (UNAM) 1841
      • Nanotechnology Research Center (NANOTAM) 1027
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