Broadband absorption enhancement in an uncooled microbolometer infrared detector

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buir.contributor.authorOkyay, Ali Kemal
dc.citation.epage8en_US
dc.citation.spage1en_US
dc.citation.volumeNumber9070en_US
dc.contributor.authorKebapcı, B.en_US
dc.contributor.authorDervişoğlu, Ö.en_US
dc.contributor.authorBattal, Enesen_US
dc.contributor.authorOkyay, Ali Kemalen_US
dc.contributor.authorAkın, T.en_US
dc.coverage.spatialBaltimore, Maryland, United Statesen_US
dc.date.accessioned2016-02-08T12:03:32Zen_US
dc.date.available2016-02-08T12:03:32Zen_US
dc.date.issued2014en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.descriptionDate of Conference: 5-9 May 2014en_US
dc.descriptionConference Name: SPIE Defense and Security Symposium, 2014en_US
dc.description.abstractThis paper introduces a method for a broadband absorption enhancement in the LWIR range (8-12 μm), in single layer microbolometer pixels with 35 μm pitch. For the first time in the literature, this study introduces a very simple and low cost approach to enhance the absorption by embedding plasmonic structures at the same level as the already existing metallic layer of a microbolometer pixel. The metal layer comprises the electrode and the arm structures on the body. Even though the periodicity of the plasmonic structures is slightly disturbed by the placement of the electrodes and the connecting metal, the metal arms and the electrodes compensate for the lack of the periodicity contributing to the resonance by their coupling with the individual plasmonic resonators. Various plasmonic structures are designed with FDTD simulations. Individual, plasmonically modified microbolometer pixels are fabricated, and an increase in the average absorption due to surface plasmon excitation at Au/Si3N4 interfaces is observed. Plasmonic structures increase the average absorption from 78% to 82% and result in an overall enhancement of 5.1%. A good agreement between the simulation and the FTIR measurement results are obtained within the LWIR range. This work paves the way for integration of the plasmonic structures within conventional microbolometer devices for performance enhancement without introducing additional costs.en_US
dc.identifier.doi10.1117/12.2069937en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/11693/27871en_US
dc.language.isoEnglishen_US
dc.publisherSPIEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1117/12.2069937en_US
dc.source.titleProceedings of SPIE Vol. 9070, Infrared Technology and Applications XLen_US
dc.subjectAbsorption enhancementen_US
dc.subjectBroadbanden_US
dc.subjectLWIRen_US
dc.subjectMicrobolometersen_US
dc.subjectSurface plasmonsen_US
dc.subjectBolometersen_US
dc.subjectElectrodesen_US
dc.subjectInfrared radiationen_US
dc.titleBroadband absorption enhancement in an uncooled microbolometer infrared detectoren_US
dc.typeConference Paperen_US
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Department of Electrical and Electronics Engineering
Institute of Materials Science and Nanotechnology (UNAM)
Nanotechnology Research Center (NANOTAM)