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      • Department of Electrical and Electronics Engineering
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      Improved performance of cMUT with nonuniform membranes

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      Author
      Şenlik, Muhammed N.
      Olcum, Selim
      Atalar, Abdullah
      Date
      2005-09
      Source Title
      Proceedings - IEEE Ultrasonics Symposium, 2005
      Publisher
      IEEE
      Pages
      597 - 600
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      When capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can be transferred. We present a membrane shape to shift the second resonance frequency to a higher value. The structure consists of a very thin membrane at the outer rim with a rigid mass at the center. The stiffness of the central region moves the second resonance to a higher frequency. This membrane configuration is shown to work better in terms of gain and bandwidth as compared to conventional uniform membranes in both transmission and reception. © 2005 IEEE.
      Keywords
      Bandwidth
      Capacitance
      Micromachining
      Natural frequencies
      Resonance
      Capacitive micromachined ultrasonic transducers
      Nonuniform membranes
      Second resonance frequency
      Thin membranes
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/27311
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2005.1602923
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      • Department of Electrical and Electronics Engineering 3524
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