Improved performance of cMUT with nonuniform membranes
Author
Şenlik, Muhammed N.
Olcum, Selim
Atalar, Abdullah
Date
2005-09Source Title
Proceedings - IEEE Ultrasonics Symposium, 2005
Publisher
IEEE
Pages
597 - 600
Language
English
Type
Conference PaperItem Usage Stats
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Abstract
When capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can be transferred. We present a membrane shape to shift the second resonance frequency to a higher value. The structure consists of a very thin membrane at the outer rim with a rigid mass at the center. The stiffness of the central region moves the second resonance to a higher frequency. This membrane configuration is shown to work better in terms of gain and bandwidth as compared to conventional uniform membranes in both transmission and reception. © 2005 IEEE.
Keywords
BandwidthCapacitance
Micromachining
Natural frequencies
Resonance
Capacitive micromachined ultrasonic transducers
Nonuniform membranes
Second resonance frequency
Thin membranes
Ultrasonic transducers