Improved performance of cMUT with nonuniform membranes

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage600en_US
dc.citation.spage597en_US
dc.contributor.authorŞenlik, Muhammed N.en_US
dc.contributor.authorOlcum, Selimen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.coverage.spatialRotterdam, The Netherlands
dc.date.accessioned2016-02-08T11:50:18Z
dc.date.available2016-02-08T11:50:18Z
dc.date.issued2005-09en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionDate of Conference: 18-21 Sept. 2005
dc.descriptionConference name: IEEE Ultrasonics Symposium, 2005
dc.description.abstractWhen capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can be transferred. We present a membrane shape to shift the second resonance frequency to a higher value. The structure consists of a very thin membrane at the outer rim with a rigid mass at the center. The stiffness of the central region moves the second resonance to a higher frequency. This membrane configuration is shown to work better in terms of gain and bandwidth as compared to conventional uniform membranes in both transmission and reception. © 2005 IEEE.en_US
dc.identifier.doi10.1109/ULTSYM.2005.1602923en_US
dc.identifier.urihttp://hdl.handle.net/11693/27311
dc.language.isoEnglishen_US
dc.publisherIEEE
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2005.1602923en_US
dc.source.titleProceedings - IEEE Ultrasonics Symposium, 2005en_US
dc.subjectBandwidthen_US
dc.subjectCapacitanceen_US
dc.subjectMicromachiningen_US
dc.subjectNatural frequenciesen_US
dc.subjectResonanceen_US
dc.subjectCapacitive micromachined ultrasonic transducersen_US
dc.subjectNonuniform membranesen_US
dc.subjectSecond resonance frequencyen_US
dc.subjectThin membranesen_US
dc.subjectUltrasonic transducersen_US
dc.titleImproved performance of cMUT with nonuniform membranesen_US
dc.typeConference Paperen_US
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