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      Rayleigh-bloch waves in CMUT arrays

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      Author(s)
      Atalar, Abdullah
      Köymen, Hayrettin
      Oğuz, H. K.
      Date
      2014
      Source Title
      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
      Print ISSN
      0885-3010
      Publisher
      Institute of Electrical and Electronics Engineers Inc.
      Volume
      61
      Issue
      12
      Pages
      2139 - 2148
      Language
      English
      Type
      Article
      Item Usage Stats
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      255
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      Abstract
      Using the small-signal electrical equivalent circuit of a capacitive micromachined ultrasonic transducer (CMUT) cell, along with the self and mutual radiation impedances of such cells, we present a computationally efficient method to predict the frequency response of a large CMUT element or array. The simulations show spurious resonances, which may degrade the performance of the array. We show that these unwanted resonances are due to dispersive Rayleigh-Bloch waves excited on the CMUT surface-liquid interface. We derive the dispersion relation of these waves for the purpose of predicting the resonance frequencies. The waves form standing waves at frequencies where the reflections from the edges of the element or the array result in a Fabry-Pérot resonator. High-order resonances are eliminated by a small loss in the individual cells, but low-order resonances remain even in the presence of significant loss. These resonances are reduced to tolerable levels when CMUT cells are built from larger and thicker lates at the expense of reduced bandwidth. © 2014 IEEE.
      Keywords
      Cells
      Cytology
      Dispersions
      Frequency response
      Resonance
      Ultrasonic transducers
      Capacitive micromachined ultrasonic transducer
      Computationally efficient
      Dispersion relations
      Electrical equivalent circuit
      High-order resonances
      Radiation impedance
      Resonance frequencies
      Surface-liquid interfaces
      Dispersion (waves)
      Permalink
      http://hdl.handle.net/11693/24869
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/TUFFC.2014.006610
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      • Department of Electrical and Electronics Engineering 3868
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