Rayleigh-bloch waves in CMUT arrays

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage2148en_US
dc.citation.issueNumber12en_US
dc.citation.spage2139en_US
dc.citation.volumeNumber61en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorOğuz, H. K.en_US
dc.date.accessioned2016-02-08T10:35:30Z
dc.date.available2016-02-08T10:35:30Z
dc.date.issued2014en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractUsing the small-signal electrical equivalent circuit of a capacitive micromachined ultrasonic transducer (CMUT) cell, along with the self and mutual radiation impedances of such cells, we present a computationally efficient method to predict the frequency response of a large CMUT element or array. The simulations show spurious resonances, which may degrade the performance of the array. We show that these unwanted resonances are due to dispersive Rayleigh-Bloch waves excited on the CMUT surface-liquid interface. We derive the dispersion relation of these waves for the purpose of predicting the resonance frequencies. The waves form standing waves at frequencies where the reflections from the edges of the element or the array result in a Fabry-Pérot resonator. High-order resonances are eliminated by a small loss in the individual cells, but low-order resonances remain even in the presence of significant loss. These resonances are reduced to tolerable levels when CMUT cells are built from larger and thicker lates at the expense of reduced bandwidth. © 2014 IEEE.en_US
dc.identifier.doi10.1109/TUFFC.2014.006610en_US
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/24869
dc.language.isoEnglishen_US
dc.publisherInstitute of Electrical and Electronics Engineers Inc.en_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/TUFFC.2014.006610en_US
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Controlen_US
dc.subjectCellsen_US
dc.subjectCytologyen_US
dc.subjectDispersionsen_US
dc.subjectFrequency responseen_US
dc.subjectResonanceen_US
dc.subjectUltrasonic transducersen_US
dc.subjectCapacitive micromachined ultrasonic transduceren_US
dc.subjectComputationally efficienten_US
dc.subjectDispersion relationsen_US
dc.subjectElectrical equivalent circuiten_US
dc.subjectHigh-order resonancesen_US
dc.subjectRadiation impedanceen_US
dc.subjectResonance frequenciesen_US
dc.subjectSurface-liquid interfacesen_US
dc.subjectDispersion (waves)en_US
dc.titleRayleigh-bloch waves in CMUT arraysen_US
dc.typeArticleen_US
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