Micromachined two-dimensional array piezoelectrically actuated transducers

Date
1998-03-16
Authors
Perçin, G.
Atalar, Abdullah
Degertekin, L.
Khuri-Yakub, B. T.
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Source Title
Applied Physics Letters
Print ISSN
0003-6951
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Publisher
A I P Publishing LLC
Volume
72
Issue
11
Pages
1397 - 1399
Language
English
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Abstract

This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.

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