Micromachined two-dimensional array piezoelectrically actuated transducers

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1399en_US
dc.citation.issueNumber11en_US
dc.citation.spage1397en_US
dc.citation.volumeNumber72en_US
dc.contributor.authorPerçin, G.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorDegertekin, L.en_US
dc.contributor.authorKhuri-Yakub, B. T.en_US
dc.date.accessioned2015-07-28T11:56:29Z
dc.date.available2015-07-28T11:56:29Z
dc.date.issued1998-03-16en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.description.abstractThis letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addressing circuitry for different applications.en_US
dc.identifier.doi10.1063/1.121067en_US
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/10991
dc.language.isoEnglishen_US
dc.publisherA I P Publishing LLCen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.121067en_US
dc.source.titleApplied Physics Lettersen_US
dc.subjectMicromachined two-dimensional arrayen_US
dc.titleMicromachined two-dimensional array piezoelectrically actuated transducersen_US
dc.typeArticleen_US
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