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      • Department of Electrical and Electronics Engineering
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      Independent parallel lithography using the atomic force microscope

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      Author(s)
      Minne, S. C.
      Manalis, S. R.
      Atalar, Abdullah
      Quate, C. F.
      Date
      1996-05
      Source Title
      Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
      Print ISSN
      2166-2746
      Electronic ISSN
      2166-2754
      Publisher
      A I P Publishing LLC
      Volume
      14
      Issue
      4
      Pages
      2456 - 2461
      Language
      English
      Type
      Article
      Item Usage Stats
      139
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      104
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      Abstract
      Independent parallel features have been lithographically patterned with a 2×1 array of individually controlled cantilevers using an atomic force microscope. Control of the individual cantilevers was achieved with an integrated piezoelectric actuator in feedback with a piezoresistive sensor. Patterns were formed on 〈100〉 single crystal silicon by using a computer controlled tip voltage to locally enhance the oxidation of the silicon. Using the piezoresistor directly as a force sensor, parallel images can be simultaneously acquired in the constant force mode. A discussion of electrostatic forces due to applied tip voltages, hysteresis characteristics of the actuator, and the cantilever system is also presented.
      Keywords
      Chemical elements
      Piezoelectricity
      Piezoresistance
      Sensors
      Electrostatics
      Permalink
      http://hdl.handle.net/11693/10829
      Published Version (Please cite this version)
      http://dx.doi.org/10.1116/1.588753
      Collections
      • Department of Electrical and Electronics Engineering 3702
      • Institute of Materials Science and Nanotechnology (UNAM) 1930
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