Browsing by Subject "Cantilevers"
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Item Open Access Centimeter scale atomic force microscope imaging and lithography(A I P Publishing LLC, 1998-09-21) Minne, S. C.; Adams, J. D.; Yaralioglu, G.; Manalis, S. R.; Atalar, Abdullah; Quate, C. F.We present a 4 mm2 image taken with a parallel array of 10 cantilevers, an image spanning 6.4 mm taken with 32 cantilevers, and lithography over a 100 mm2 area using an array of 50 cantilevers. All of these results represent scan areas that are orders of magnitude larger than that of a typical atomic force microscope (0.01 mm2). Previously, the serial nature and limited scan size of the atomic force microscope prevented large scale imaging. Our design addresses these issues by using a modular micromachined parallel atomic force microscope array in conjunction with large displacement scanners. High-resolution microscopy and lithography over large areas are important for many applications, but especially in microelectronics, where integrated circuit chips typically have nanometer scale features distributed over square centimeter areas.Item Open Access Design and analysis of integrated optical sensors for scanning probe microscopies(IEEE, 2005) Kocabas, C.; Aydınlı, AtillaIn this paper, a novel probe for displacement sensing will be introduced. It is based on a conventional GaAs cantilever, integrated with a Bragg grating as a photo-elastic strain sensor. The deflection of the cantilever is measured directly from the intensity modulation of the reflected light. The principle of the experimental setup and the sensor, as well as the theoretical investigation of the force and displacement sensitivity of the probe, is presented. Finite-element method simulations were performed to get the optimum sensor design. Transfer matrix method simulation of the waveguide grating have been described in detail. In order to enhance the sensitivity, different types of grating structures are discussed. Using this new design, it should be possible to achieve sensitivities, defined as the fractional change in detected optical power per unit displacement of the cantilever, as high as 10(-4) &ANGS;(-1) of cantilever deflection.Item Open Access High-speed tapping mode imaging with active Q control for atomic force microscopy(American Institute of Physics, 2000) Sulchek, T.; Hsieh, R.; Adams, J. D.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Cleveland, J. P.; Atalar, Abdullah; Adderton, D. M.The speed of tapping mode imaging with the atomic force microscope(AFM) has been increased by over an order of magnitude. The enhanced operation is achieved by (1) increasing the instrument’s mechanical bandwidth and (2) actively controlling the cantilever’s dynamics. The instrument’s mechanical bandwidth is increased by an order of magnitude by replacing the piezotube z-axis actuator with an integrated zinc oxide (ZnO)piezoelectric cantilever. The cantilever’s dynamics are optimized for high-speed operation by actively damping the quality factor (Q) of the cantilever. Active damping allows the amplitude of the oscillating cantilever to respond to topography changes more quickly. With these two advancements, 80μm×80 μm high-speed tapping mode images have been obtained with a scan frequency of 15 Hz. This corresponds to a tip velocity of 2.4 mm/s.Item Open Access Parallel atomic force microscopy with optical interferometric detection(American Institute of Physics, 2001-01-05) Sulchek, T.; Grow, R. J.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Manalis, S. R.; Kiraz, A.; Aydine, A.; Atalar, AbdullahWe have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of siliconphotodiodes with integrated complementary metal–oxide–semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. © 2001 American Institute of Physics