High-speed tapping mode imaging with active Q control for atomic force microscopy

Date
2000
Authors
Sulchek, T.
Hsieh, R.
Adams, J. D.
Yaralioglu, G. G.
Minne, S. C.
Quate, C. F.
Cleveland, J. P.
Atalar, Abdullah
Adderton, D. M.
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Source Title
Applied Physics Letters
Print ISSN
0003-6951
Electronic ISSN
Publisher
American Institute of Physics
Volume
76
Issue
11
Pages
1473 - 1475
Language
English
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Abstract

The speed of tapping mode imaging with the atomic force microscope(AFM) has been increased by over an order of magnitude. The enhanced operation is achieved by (1) increasing the instrument’s mechanical bandwidth and (2) actively controlling the cantilever’s dynamics. The instrument’s mechanical bandwidth is increased by an order of magnitude by replacing the piezotube z-axis actuator with an integrated zinc oxide (ZnO)piezoelectric cantilever. The cantilever’s dynamics are optimized for high-speed operation by actively damping the quality factor (Q) of the cantilever. Active damping allows the amplitude of the oscillating cantilever to respond to topography changes more quickly. With these two advancements, 80μm×80 μm high-speed tapping mode images have been obtained with a scan frequency of 15 Hz. This corresponds to a tip velocity of 2.4 mm/s.

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