Statistics for Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: A case study for metal oxides
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| Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: A case study for metal oxides | 3 |
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| Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer A case study for metal oxides.pdf | 87 |
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