Statistics for Atomic layer deposition of III-nitrides and metal oxides : their application in area selective ALD
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| Atomic layer deposition of III-nitrides and metal oxides : their application in area selective ALD | 23 |
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| ATOMIC LAYER DEPOSITION OF III-NITRIDES AND METAL OXIDES_ THEIR APPLICATION IN AREA SELECTIVE ALD, Ali Haider, Bilkent U~1.pdf | 71 |
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