Statistics for The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
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| The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition | 3 |
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| The influence of N2-H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition.pdf | 38 |
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