Statistics for Low-temperature synthesis of silicon oxynitride-doped si for tunable bragg gratings homogeneously deposited on Si, SiO2, and borosilicate substrates and the tip of SM and PM optical fibers

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Low-temperature synthesis of silicon oxynitride-doped si for tunable bragg gratings homogeneously deposited on Si, SiO2, and borosilicate substrates and the tip of SM and PM optical fibers 13

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