Parallel atomic force microscopy with optical interferometric detection

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1789en_US
dc.citation.issueNumber12en_US
dc.citation.spage1787en_US
dc.citation.volumeNumber78en_US
dc.contributor.authorSulchek, T.en_US
dc.contributor.authorGrow, R. J.en_US
dc.contributor.authorYaralioglu, G. G.en_US
dc.contributor.authorMinne, S. C.en_US
dc.contributor.authorQuate, C. F.en_US
dc.contributor.authorManalis, S. R.en_US
dc.contributor.authorKiraz, A.en_US
dc.contributor.authorAydine, A.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.date.accessioned2015-07-28T11:56:25Z
dc.date.available2015-07-28T11:56:25Z
dc.date.issued2001-01-05en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractWe have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of siliconphotodiodes with integrated complementary metal–oxide–semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. © 2001 American Institute of Physicsen_US
dc.identifier.doi10.1063/1.1352697en_US
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/10957
dc.language.isoEnglishen_US
dc.publisherAmerican Institute of Physicsen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.1352697en_US
dc.source.titleApplied Physics Lettersen_US
dc.subjectCantileversen_US
dc.subjectArraysen_US
dc.titleParallel atomic force microscopy with optical interferometric detectionen_US
dc.typeArticleen_US

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